SAM® 1480/2480 G3 SERIES

G3 models satisty the demand for the next generation of samiconductor production.

FEATURES

• Multi-gas,multi-range selection
• Pressure-insensitive operation Pl
• LCD display (temp, pressure, set output) easifies control routines
• Self celibration function

BENEFITS

• Great inlet pressure change insensitivity
• Allows one mass flow controller to handle two or more gas types and ranges
• The need for dedicated devices is reduced to only a few models
• Reduces the capital investment and inventory liability
• Performance maintained after gas change
• Shortening gas purge time needed
• Complete gas shut-off
• Gas leaking volume 1/10 related to that with a standart combination (MFC and pneumatic valve)
• Reduction of gas surge
• Allows one mass flow controller to handle two or more gas types and ranges
• The need for dedicated devices is reduced to only a few models
• Reduces the capital investmen and inventory liability
• Performace maintained after gas change